M1900 Fully-Automatic RSP150 Stocker
The Brooks M1900 RSP150 stocker provides fully-automated pod handling with an integrated continuous purge system for each individual pod.
Key Features
- Fully automated RSP150 handling
- Class 1 mini-environment/ESD/AMC
- N2/XCDA purge for each pod
- Purge flow verification
- Manual back up possible
- OHT interface
M1900 Fully-Automatic EUV Pod Stocker
The Brooks M1900 EUV pod stocker provides a fully automated EUV pod handling and a continuous purge system for each individual pod.
Key Features
- Fully-automated EUV pod handling
- ISO Class 2 mini-environment
- ESD and AMC controlled environment
- N2/XCDA purge for each pod
- Purge flow verification
- High vacuum decontamination chambers for AMC compound removal
- In-situ measurement capability
- Manual back up possible
- OHT interface
M1900 Semi-Automatic Reticle Box Stocker
The Brooks semi-automatic M1900 stores 2,680 reticle boxes. The reticle box ID is identified and the data file is logged in the data base. This optimizes the tracing of the reticles in the fab.
Key Features
- High capacity - small footprint
- Reticle management system
- Fast load/unload
- User-friendly GUI
