The RS-C is a fully automated, highly flexible standalone storage and inspection system for 6" reticles based on a modular, cartesian platform. The flexibility offered in size, features and functionality make it ideal for a variety of applications in new or existing production facilities. The RS-C system supports reticle storage, retrieval and transfer between a variety of reticle carrier types. The high throughput the RS-C achieves optimizes reticle logistics and scanner/stepper utilization.
数据表
主要特性
- Reticle storage in Tec-Cell® micro-environment
- Stores and manages from 360 up to 1776 reticles
- Up to four load ports supported: RSP, MRSP, Nikon/Canon cassettes and shippers
- Particle and pellicle defect inspection
- Air knife and reticle orientation
Options include:
- N2/xCDA purge
- Particle Detection System (PDS)
- Bright field detection option for PDS
- Macro Inspection Unit (MIU)
- Rotary / Air knife unit
- Airborne Molecular Contamination (AMC) filtering
特色
- Increased scanner/litho cell uptime
- No scanner idle time; defined reticle arrives safe, on time, correctly orientated, clean with controlled quality
- Reduced reticle rework costs
- Reticle is protected from chemical contamination, haze & crystal growth
- Increased number of possible exposures results in a high wafer in process (WIP) cycle time
- Quality control, certifiable solution
- Fully automated reticle handling, defined inspection procedures
- Reliable, safe handling prevents reticle and pellicle damages, as well as human mistakes
- Low cost of ownership (COO)
- Low purge gas consumption (0.375 slpm/recticle)
