The RS-C is a fully automated, highly flexible standalone storage and inspection system for 6" reticles based on a modular, cartesian platform. The flexibility offered in size, features and functionality make it ideal for a variety of applications in new or existing production facilities. The RS-C system supports reticle storage, retrieval and transfer between a variety of reticle carrier types. The high throughput the RS-C achieves optimizes reticle logistics and scanner/stepper utilization.
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