The RX family is an innovative combination of reticle stocker and carrier buffer for manageing the reticles throughout the fab.
The RX is a fully automated reticle management system that combines a reticle and carrier sort and storagesystem for up to 2880 reticles on the smallest footprint.
The reticles are safely stored in patented Tec-Cell® modules, providing an ISO Class 1 micro-environment that can be optionally purged with N2 or xCDA.
The system can be configured to accommodate common RSP150 and MRSP150 reticle carriers. The field upgradeable OHT load-ports enable the system to be integrated in fully automated litho bays
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