The RXi is a fully automated standalone inspection system for 6” reticles many options including Particle Detection System (PDS), Macro Inspection Unit (MIU), Air knife – particle blow off station and Reticle Rotary Unit.
The RXi system supports reticle storage, retrieval and transfer between a variety of reticle carrier types. The high throughput RXi optimizes the scanner/stepper utilization.
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