Compatible with all FOUPs
Two unique shape chambers enable the washing and drying of all SEMI compliant FOUPs.
Fully Automatic Process (AMHS Ready)
This unmanned energy-saving system is compliant with GEM300/AMHS
and improves efficiency and cleaning performance.
World-class Cleaning & Drying Performance
World-class cleaning and drying performance allows each FOUP to be washed individually in the two chambers. Purified water jets are sprayed from multiple nozzles, creating a mini-environment inside the chamber. A two-phase drying system removes the water quickly that drys the FOUP.
Class 1-10 Cleanliness Inside
Ionizer bars installed at the FOUP entry/exit points under FFU and area sensors monitor every side surface, ensuring cleanliness and safety inside the machine. Class 1-10 cleanliness inside installable under a class 1000-5000 environment minimizes the high-grade clean room requirement.
Hot Start Method
Our Hot Start Method allows the chamber to be used anytime and does not require warm-up time or time-consuming test runs.
Prevents Cross-contamination
The ID on the FOUP is read. Then, the FOUP is automatically sorted in the chamber, which prevents cross contamination and ensures optimum cleaning.
Weight Reduced and System Modularized
System weight has been reduced 1,000 kg compared to the original model. Modularization has been introduced to simplify installation. The small footprint makes it easy to install and shift equipment when changing production line layout.
N2 Purge Port Drying (Optional)
A nitrogen purge port is available that is designed especially for cleaning and drying FOUPs.
