M600 Automatic RSP Cleaner

The M600 fully-automatic central force cleaner is the perfect solution for the automatic cleaning of RSP150 or RSP200. In manual mode, all types of reticle or wafer carriers can be cleaned.


  • Fully-automated cleaning of RSP150 or RSP200
  • 半自动清洗各种掩膜版/晶圆料盒
  • 内部缓冲器
  • 红外干燥技术
  • 支持手动操作
  • OHT 接口
  • 1 级无尘室和 ESD
  • 符合 SEMI 标准的 SECS/GEM 接口