Factory Automation Solutions

Brooks offers the industry’s cleanest wafer sorter and load ports. The Spartan Sorter delivers industry-leading particle performance along with productivity and serviceability; our 300mm Vision load ports are ultra-clean with reliable and flexible tool interfaces; and our 200mm SMIF load port transfers (LPT) products are the industry’s standard for adaptive SMIF solutions. Additionally, Brooks offers an innovative near-tool buffer solution to reduce AMHS bottlenecks and increase tool utilization.