PuroMaxx Contamination Control

Brooks offers the industry’s most advanced suite of FOUP carrier/reticle pod cleaners and photomask/reticle stockers. Using state-of-the-art humidity control along with in-situ metrology, our products address all critical airborne molecular contamination, productivity, and process stability challenges at sub20-nm nodes. 

Cleaning Equipment

• PuroMaxx^™ FOUP/Pod Cleaners
• PuroMaxx^™ EUV Pod Cleaner

Clean Storage

• GuardianPro^™ Reticle Storage

Reticle Handling

• PuroMaxx^™ 2 Reticle Changers