Reticle Handling
PuroMaxx 2 Reticle Changers
The Brooks PuroMaxx™ 2 Reticle Changer is a reticle/mask exchange and inspection system. Individual I/O stations allow transfer of the reticle/mask between all scanner/stepper and shipping boxes, such as Canon, Nikon, ASML, Toppan, Hoya, DMS box, etc.
PuroMaxx 2 allows transfer of the reticle/mask between all scanner/stepper and shipping boxes.
Key Features:
- Fully automated reticle/mask handling
- Class 1 mini-environment/ESD/AMC
- Reticle orientation
- Reticle code identification
- RF-tag or barcode identification of boxes
- Bright light visual inspection
- Embedded metrology tool
- N2 blow off